Ongoing Projects
Ongoing Special Gas Project
Hangzhou, Zhejiang Province
Total special gas system engineering service , gas detection & alarm system and hook-up engineering project for a 8-inch wafer process, including over 30 kinds of purified bulk gas and special gas.
Ongoing Special Gas and TGCM Project
Suzhou, Jiangsu Province
Total Facility System (including bulk gas and special gas) TGCM in a 12-inch pilot line site.
Includes over 30 types of special gases:
- Corrosive gases, like: Cl2, NH3, HCl, etc
- Reactive gases, like: H2, SiH4, NF3, GeH4, etc
- Non-reactive gases, like: CF4, SF6, CH4, N2O, etc
Includes comprehensive plant-wide utility maintenance and operation services
Ongoing Overseas Projects
Beijing
Installation and setup for a requirements of total gas consumptions of GN2 with 200k nm3/hr :-
- 4 Sets of 2000 Nm³/Hr Nitrogen generators and bulk gas backup storage tank supply system.
- Bulk & high-purity gas system, including purifiers and analysers.
- Semiconductor-grade bulk gas pipeline network with over 10,000 meters long-distance distribution infrastructure.
Ongoing Projects in Malaysia
